F12100 - SEMI F121 - Guide for Evaluating Metrology for Particle Precursors in Ultrapure Water Revision:SEMI F121-0923 - Current If specific inlet challenge(s) and/or

If specific inlet challenge(s) and/or inlet measurements are required

such as large-size curved displays

SEMI G5-85 (technical revision)

losing compatibility

1を参照）。

F12100 - SEMI F121 - Guide for Evaluating Metrology for Particle Precursors in Ultrapure Water Revision:SEMI F121-0923 - Current If specific inlet challenge(s) and/orThis Guide provides a performance based definition of metrology that can be used to measure particle precursors in ultrapure water (UPW). This Guide includes a testing methodology and criteria for qualifying measurement techniques for quantifying particle precursor concentrations in UPW. Particle precursors are defined as dissolved compounds that can form particles when dried on a wafer surface. This definition was developed by the UPW International